1

Varian Semiconductor

8.71

Throughput

2

ASML

8.50

Quality of results

3

Nissin Electric Co., Ltd.

8.29

Product performance, Support after sales,

And Commitment (three-way-tie**)

4

Kulicke & Soffa Industries.Inc

7.94

Quality of results, Product Performance,

Process support, Support after sales,

Technical leadership, and Commitment(six-way-tie**)

5

ACCRETECH - Tokyo Seimitsu Co. Ltd

7.72

Throughput

6

Oerlikon Balzers Coating Systems

7.69

Uptime, Product performance,

after sales, Technical leadership,

and Commitment (five-way-tie**)

7

Tokyo Electron Limited

7.67

Throughput

8

SUSS MicroTec

7.56

Field engineering support

9

ASM International N.V.

7.55

Quality of results

10

Seiko Epson Corporation

7.53

Build quality

11

Advantest

7.52

Uptime

12

Verigy

7.35

Uptime

13

Novellus Systems, Inc.

7.28

Throughput

14

Teradyne, Inc.

7.14

Uptime

15

Dainippon Screen Mfg. Co. Ltd.

7.03

Uptime

16

Axcelis Technologies

7.00

Product performance?

17

Credence Systems Corporation

6.93

Throughput

18

EV Group

6.91

Support after sales

19

Nikon Corporation

6.90

Throughput

20

Applied Materials, Inc.

6.85

Throughput