以色列半导体测量设备供应商Nova Measuring Instruments公司日前宣布，其NovaScan独立式（stand-alone）测量设备再次获得中国最大晶圆厂商的订单。Nova与客户之间的协议包括独立测量、集成测量（integrated metrology）及NovaMARS应用方案，交易总额数百万美元，此次订单为其中一部分。

首套NovaScan光学CD及形状剖析测量系统在2007年安装完成，该客户称，NovaScan较同类产品具备更优异的性能更高的吞吐能力；另外Nova提供了良好的技术支持。客户表示在两家工厂中将采取独立与集成相结合的测量解决方案。

Nova销售部副总裁Dov Farkash表示，我们非常荣幸向该客户的第二座工厂提供测量设备，根据客户反应，测量系统的优异表现及吞吐能力具有极佳的成本效益。我们相信将为客户提供完善的技术服务来支持其产能扩展计划。

Nova Measuring Instruments 是全球性半导体量测设备的先进制造厂，目前世界最大的25 个IC 制造厂中的21 个皆采用Nova量测仪器及解决方案。NOVA公司藉由薄膜与光学CD，及形状剖析度量方面的专业技术与专利，针对300mm与200mm 晶圆IC制造需求，技术层次由 90nm 演进到45nm 与 32nm的先进技术，提供量测与制程完善控制。

Nova Announces Follow-on Order from China’s Largest Foundry for its
??????????????????????????? Metrology Solutions
??? Order for second fab is part of multi-million dollar deal to supply
?????? combination of stand-alone and integrated metrology solutions

REHOVOT,? Israel,? March 3, 2008 - Nova Measuring Instruments Ltd. (NASDAQ:
NVMI)? provider of leading edge stand-alone metrology and the market leader
of? integrated? metrology? solutions? to? the semiconductor process control
market,? announced? a follow on NovaScan stand-alone order from the largest
foundry in China as part of a multi million dollar deal to supply its stand
alone? metrology, integrated metrology and NovaMARS application development
solutions.

Nova? is? providing? multiple? units? of? its NovaScan Optical CD and shape
profiling? metrology? solution together with its market leading modeling SW
the? NovaMARS,? for? 2D? and? 3D? modeling.? The? first NovaScan tools were
installed? in 2007 and, according to the customer, the NovaScan stand-alone
tool? demonstrated? better? performance? than competitors, including higher
throughput.? The? customer? also? noted Nova’s excellent support. Both fabs
will use a combination of stand-alone and integrated metrology solutions.

“We are proud to be chosen to supply our shape profiling metrology solution
to this major foundry’s second location,“ said Dov Farkash, VP of Sales for
Nova,? “As? demonstrated at the customer’s site, our system offers superior
metrology? performance? and throughput, providing the most capable and cost
effective? solution? in? the? market.? Our? ability? to? provide a solution
combining?? both?? stand-alone?? and? integrated? metrology? platforms? and
state-of-the-art? modeling? software, as well as superior customer support,
creates? a? clear? advantage? for? the customer. We believe that this major
foundry,? with? its? leading? position,? is? setting? the trend for China’s
semiconductor? industry? and? we? look? forward? to supporting them as they
pursue further expansion plans in the future.”