领先的晶圆处理技术和设备供应商WaferMasters日前宣布推出多波长拉曼谱系统MRS-300。该系统可实现对晶圆局部晶格应力和晶体质量进行非破坏性表征以及深度形貌表征。该系统还可用于应变硅技术，进行非接触、非破坏的锗分布表征。

WaferMasters公司联合创始人兼CTO Woo Sik Yoo博士表示，MRS-300可使工程师获得晶圆和器件的物理状态的观察与分析，之前这些必须依赖破坏性的透射电子显微镜（TEM）。MRS-300使非破坏性可靠的物理表征成为了可能。

WaferMasters Introduces the MRS-300 Multi-Wavelength Raman Spectrometer for Non-Destructive Wafer Strain and Crystal Quality Characterization.

SAN JOSE, California - WaferMasters, Inc, a leading wafer-processing technology and equipment supplier has announced the release of its Multi-Wavelength Raman Spectroscopy System (MRS-300).? This advanced system allows non-destructive wafer characterization of local lattice strain and crystal quality, as well as depth profiling at the point of interest of these important characteristics for evaluation or product wafers. It can be used as a non-contact, non-destructive Ge content characterization tool for strained Si technology, as well.?

This powerful tool is aimed at improving yields, device performance and quality. The MRS-300 allows process engineers to optimize wafer processing by evaluating the strain and crystal quality characteristics of the wafer as process parameters or even tool sets are varied. It also affords manufacturing engineers a non-destructive method for monitoring internal characteristics of the wafer’s structure for comparison against a production baseline after key processes. . The history of local and global lattice level stress collected between device manufacturing process steps often indicates the probability of premature device failure under normal and accelerated modes of operation. With this non- contact tool, it is possible to predict some electrical performance degradations, even before metallization and contact formations are made.?

Dr. Woo Sik Yoo, co-founder and CTO observed that the MRS-300 allows engineers to gain analysis and insight into the physical condition of the wafer or device as a function of depth that previously required destructive cross-sectioning and Transmission Electron Microscopy (TEM). But now, thanks to the non-destructive, non-invasive nature of the MRS-300, sequential physical characterization and electrical data correlation are possible. “The fact that neither the instrument nor the sample need be moved to change laser frequency allows depth profiling at the precise point of interest was a very important consideration in the design of this tool”, noted Dr. Yoo.

The MRS-300 and its companion tool, the just announced OSP-300 (Optical Surface Profilometer), were designed by WaferMasters to give process engineers the tools they need to improve process repeatability and device yield through improved knowledge of the physical condition of the wafer as it goes through sequential process steps.

About WaferMasters, Inc.

WaferMasters, Inc., founded in 1999, is a privately held manufacturer of thermal production and metrology tools used to fabricate advanced semiconductor devices. Reduced process monitoring and high equipment utilization, together with minimum consumables usage and maintenance contribute to the lowest COO in the industry. WaferMasters, Inc. maintains headquarters at 246 East Gish Road, San Jose, California 95112. Visit WaferMasters at Semicon/West, Booth #5317North?? or on the web atwww、wafermasters、com??